10/9/2011	10:47:31 AM	H2 valve closed
10/9/2011	10:47:59 AM	Main Vac valve closed
10/9/2011	10:47:59 AM	H2 valve opened
10/9/2011	10:48:10 AM	H2 valve closed
10/9/2011	10:48:46 AM	H2 valve opened
10/9/2011	10:49:32 AM	H2 MFC set to  500.000000
10/9/2011	10:49:41 AM	H2 valve closed
10/9/2011	10:49:43 AM	Main Vac valve opened
10/9/2011	10:49:58 AM	Main Vac valve closed
10/9/2011	10:50:00 AM	H2 valve opened
10/9/2011	10:50:02 AM	H2 valve closed
10/9/2011	10:50:25 AM	H2 valve opened
10/9/2011	10:51:53 AM	Main Vac valve opened
10/9/2011	10:51:56 AM	H2 valve closed
10/9/2011	10:52:03 AM	H2 MFC set to  0.000000
10/9/2011	10:53:15 AM	Main Vac valve closed
10/9/2011	10:53:39 AM	H2 MFC set to  200.000000
10/9/2011	10:53:40 AM	H2 valve opened
10/9/2011	10:54:13 AM	H2 valve closed
10/9/2011	10:54:19 AM	Helium MFC set to  50.000000
10/9/2011	10:54:20 AM	Helium valve opened
10/9/2011	10:54:25 AM	Helium valve closed
10/9/2011	10:54:26 AM	Bypass valve opened
10/9/2011	10:54:30 AM	Helium MFC set to  0.000000
10/9/2011	10:54:57 AM	Bypass valve closed
10/9/2011	10:54:58 AM	Main Vac valve opened
10/9/2011	10:55:08 AM	Main Vac valve closed
10/9/2011	10:55:10 AM	H2 valve opened
10/9/2011	10:55:23 AM	H2 valve closed
10/9/2011	10:55:27 AM	H2 MFC set to  500.000000
10/9/2011	10:55:27 AM	H2 valve opened
10/9/2011	10:55:31 AM	H2 valve closed
10/9/2011	10:55:32 AM	Main Vac valve opened
10/9/2011	12:54:01 PM	Main Vac valve closed
10/9/2011	12:54:03 PM	H2 valve opened
10/9/2011	12:54:08 PM	H2 valve closed
10/9/2011	12:54:09 PM	Main Vac valve opened
10/9/2011	2:40:38 PM	Main Vac valve closed
10/9/2011	2:40:40 PM	Bypass valve opened
10/9/2011	2:40:56 PM	H2 MFC set to  50.000000
10/9/2011	2:40:57 PM	H2 valve opened
10/9/2011	2:41:23 PM	H2 valve closed
10/9/2011	2:42:33 PM	Helium MFC set to  50.000000
10/9/2011	2:42:35 PM	Helium valve opened
10/9/2011	2:42:48 PM	Helium valve closed
10/9/2011	2:42:50 PM	H2 valve opened
10/9/2011	2:43:00 PM	H2 valve closed
10/9/2011	2:44:59 PM	H2 valve opened
10/9/2011	2:45:30 PM	H2 valve closed
10/9/2011	2:45:43 PM	Helium valve opened
10/9/2011	2:46:12 PM	Helium MFC set to  500.000000
10/9/2011	2:46:18 PM	Helium MFC set to  0.000000
10/9/2011	2:46:38 PM	Helium valve closed
10/9/2011	2:46:40 PM	H2 valve opened
10/9/2011	2:48:02 PM	H2 valve closed
10/9/2011	2:48:12 PM	H2 MFC set to  0.000000
10/9/2011	2:52:51 PM	Helium MFC set to  50.000000
10/9/2011	2:52:52 PM	Helium valve opened
10/9/2011	2:53:00 PM	Helium valve closed
10/9/2011	2:53:02 PM	Helium MFC set to  0.000000
10/9/2011	2:53:05 PM	H2 MFC set to  50.000000
10/9/2011	2:53:06 PM	H2 valve opened
10/9/2011	2:53:50 PM	H2 valve closed
10/9/2011	2:58:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/9/2011	2:58:31 PM	Recipe started at 2:58 PM
10/9/2011	2:58:31 PM	Helium valve closed
10/9/2011	2:58:31 PM	H2 valve closed
10/9/2011	2:58:31 PM	BCl3 valve closed
10/9/2011	2:58:31 PM	PH3 valve closed
10/9/2011	2:58:31 PM	SiCl4 pre valve closed
10/9/2011	2:58:31 PM	SiCl4 post valve closed
10/9/2011	2:58:31 PM	Main Vac valve closed
10/9/2011	2:58:31 PM	Bypass valve closed
10/9/2011	2:58:31 PM	Bubbler valve closed
10/9/2011	2:58:31 PM	Helium MFC set to  0.000000
10/9/2011	2:58:31 PM	H2 MFC set to  0.000000
10/9/2011	2:58:31 PM	BCl3 MFC set to  0.000000
10/9/2011	2:58:31 PM	PHl3 MFC set to  0.000000
10/9/2011	2:58:31 PM	SiCl4 MFC set to  0.000000
10/9/2011	2:58:31 PM	Bypass solenoid MFC set to  0.000000
10/9/2011	2:58:31 PM	Tube furnace set to 0
10/9/2011	2:58:34 PM	H2 valve closed
10/9/2011	2:58:34 PM	BCl3 valve closed
10/9/2011	2:58:34 PM	PH3 valve closed
10/9/2011	2:58:34 PM	SiCl4 pre valve closed
10/9/2011	2:58:34 PM	SiCl4 post valve closed
10/9/2011	2:58:34 PM	Main Vac valve closed
10/9/2011	2:58:34 PM	Bypass valve closed
10/9/2011	2:58:34 PM	Bubbler valve closed
10/9/2011	2:58:34 PM	Helium valve opened
10/9/2011	2:58:34 PM	Helium MFC set to  500.000000
10/9/2011	2:58:34 PM	H2 MFC set to  0.000000
10/9/2011	2:58:34 PM	BCl3 MFC set to  0.000000
10/9/2011	2:58:34 PM	PHl3 MFC set to  0.000000
10/9/2011	2:58:34 PM	SiCl4 MFC set to  0.000000
10/9/2011	2:58:34 PM	Bypass solenoid MFC set to  0.000000
10/9/2011	2:58:34 PM	Tube furnace set to 0
10/9/2011	2:59:35 PM	Helium valve closed
10/9/2011	2:59:35 PM	H2 valve closed
10/9/2011	2:59:35 PM	BCl3 valve closed
10/9/2011	2:59:35 PM	PH3 valve closed
10/9/2011	2:59:35 PM	SiCl4 pre valve closed
10/9/2011	2:59:35 PM	SiCl4 post valve closed
10/9/2011	2:59:35 PM	Main Vac valve closed
10/9/2011	2:59:35 PM	Bypass valve closed
10/9/2011	2:59:35 PM	Bubbler valve closed
10/9/2011	2:59:35 PM	Helium MFC set to  0.000000
10/9/2011	2:59:35 PM	H2 MFC set to  0.000000
10/9/2011	2:59:35 PM	BCl3 MFC set to  0.000000
10/9/2011	2:59:35 PM	PHl3 MFC set to  0.000000
10/9/2011	2:59:35 PM	SiCl4 MFC set to  0.000000
10/9/2011	2:59:35 PM	Bypass solenoid MFC set to  0.000000
10/9/2011	2:59:35 PM	Tube furnace set to 0
10/9/2011	2:59:36 PM	Run finished at 2:59 PM
10/9/2011	2:59:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/9/2011	3:07:44 PM	H2 valve opened
10/9/2011	3:07:45 PM	H2 valve closed
10/9/2011	3:07:46 PM	Helium valve opened
10/9/2011	3:07:47 PM	Helium valve closed
10/9/2011	3:07:47 PM	Helium valve opened
10/9/2011	3:07:48 PM	Helium valve closed
10/9/2011	3:07:48 PM	Helium valve opened
10/9/2011	3:07:49 PM	Helium valve closed
10/9/2011	3:18:32 PM	H2 valve opened
10/9/2011	3:18:33 PM	H2 valve closed
10/9/2011	3:18:34 PM	H2 valve opened
10/9/2011	3:18:34 PM	H2 valve closed
10/9/2011	3:18:35 PM	H2 valve opened
10/9/2011	3:18:47 PM	H2 valve closed
10/9/2011	3:19:07 PM	H2 valve opened
10/9/2011	3:19:07 PM	H2 valve closed
10/9/2011	3:19:08 PM	H2 valve opened
10/9/2011	3:19:18 PM	H2 valve closed
10/9/2011	3:20:01 PM	H2 valve opened
10/9/2011	3:20:09 PM	H2 valve closed
10/9/2011	3:20:36 PM	H2 valve opened
10/9/2011	3:20:37 PM	H2 valve closed
10/9/2011	6:10:23 PM	Bypass valve opened
10/9/2011	6:10:24 PM	Helium valve opened
10/9/2011	6:10:25 PM	H2 valve opened
10/9/2011	6:10:28 PM	H2 MFC set to  50.000000
10/9/2011	6:10:32 PM	Helium MFC set to  50.000000
10/9/2011	6:11:46 PM	H2 MFC set to  500.000000
10/9/2011	6:11:49 PM	Helium MFC set to  500.000000
10/9/2011	6:14:53 PM	Helium valve closed
10/9/2011	6:14:56 PM	Helium valve opened
10/9/2011	6:17:46 PM	Bypass valve closed
10/9/2011	6:17:46 PM	Main Vac valve opened
10/9/2011	6:32:52 PM	Main Vac valve closed
10/9/2011	6:33:00 PM	Helium valve closed
10/9/2011	6:33:01 PM	H2 valve closed
10/9/2011	6:33:24 PM	Bypass valve opened
10/9/2011	6:33:27 PM	Helium MFC set to  100.000000
10/9/2011	6:33:30 PM	H2 MFC set to  50.000000
10/9/2011	6:33:32 PM	Helium MFC set to  50.000000
10/9/2011	6:33:32 PM	H2 valve opened
10/9/2011	6:33:33 PM	Helium valve opened
10/9/2011	6:33:39 PM	Helium MFC set to  500.000000
10/9/2011	6:33:41 PM	H2 MFC set to  500.000000
10/9/2011	6:37:37 PM	SiCl4 post valve opened
10/9/2011	6:39:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/9/2011	6:39:00 PM	Recipe started at 6:39 PM
10/9/2011	6:39:00 PM	Helium valve closed
10/9/2011	6:39:00 PM	H2 valve closed
10/9/2011	6:39:00 PM	BCl3 valve closed
10/9/2011	6:39:00 PM	PH3 valve closed
10/9/2011	6:39:00 PM	SiCl4 pre valve closed
10/9/2011	6:39:00 PM	SiCl4 post valve closed
10/9/2011	6:39:00 PM	Main Vac valve closed
10/9/2011	6:39:00 PM	Bypass valve closed
10/9/2011	6:39:00 PM	Bubbler valve closed
10/9/2011	6:39:00 PM	Helium MFC set to  0.000000
10/9/2011	6:39:00 PM	H2 MFC set to  0.000000
10/9/2011	6:39:00 PM	BCl3 MFC set to  0.000000
10/9/2011	6:39:00 PM	PHl3 MFC set to  0.000000
10/9/2011	6:39:00 PM	SiCl4 MFC set to  0.000000
10/9/2011	6:39:00 PM	Bypass solenoid MFC set to  0.000000
10/9/2011	6:39:01 PM	Tube furnace set to 0
10/9/2011	6:39:01 PM	Run finished at 6:39 PM
10/9/2011	6:39:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/9/2011	6:39:21 PM	Bypass valve opened
10/9/2011	6:39:24 PM	Helium MFC set to  10.000000
10/9/2011	6:39:24 PM	Helium valve opened
10/9/2011	6:39:27 PM	H2 MFC set to  10.000000
10/9/2011	6:39:28 PM	H2 valve opened
10/9/2011	6:39:29 PM	SiCl4 post valve opened
10/9/2011	6:39:33 PM	SiCl4 pre valve opened
10/9/2011	6:39:36 PM	SiCl4 MFC set to  10.000000
10/9/2011	6:39:44 PM	H2 MFC set to  50.000000
10/9/2011	6:39:46 PM	Helium MFC set to  50.000000
10/9/2011	6:39:52 PM	H2 MFC set to  500.000000
10/9/2011	6:39:57 PM	Helium MFC set to  500.000000
10/9/2011	6:45:28 PM	Bypass valve closed
10/9/2011	6:45:29 PM	Main Vac valve opened
10/9/2011	6:46:20 PM	SiCl4 pre valve closed
10/9/2011	6:46:21 PM	SiCl4 post valve closed
10/9/2011	6:46:22 PM	H2 valve closed
10/9/2011	6:46:22 PM	Helium valve closed
10/9/2011	6:46:49 PM	Main Vac valve closed
10/9/2011	6:46:53 PM	Helium MFC set to  50.000000
10/9/2011	6:46:55 PM	H2 MFC set to  50.000000
10/9/2011	6:46:56 PM	Helium valve opened
10/9/2011	6:47:04 PM	H2 valve opened
10/9/2011	6:47:13 PM	Bypass valve opened
10/9/2011	6:47:19 PM	Helium MFC set to  500.000000
10/9/2011	6:47:21 PM	H2 MFC set to  500.000000
10/9/2011	6:47:22 PM	SiCl4 post valve opened
10/9/2011	6:47:22 PM	SiCl4 pre valve opened
10/9/2011	6:47:25 PM	SiCl4 MFC set to  50.000000
10/9/2011	6:51:12 PM	Bypass valve closed
10/9/2011	6:51:12 PM	Main Vac valve opened
10/9/2011	7:08:28 PM	SiCl4 pre valve closed
10/9/2011	7:08:29 PM	SiCl4 post valve closed
10/9/2011	7:08:29 PM	H2 valve closed
10/9/2011	7:08:30 PM	Helium valve closed
10/9/2011	7:08:31 PM	Main Vac valve closed
10/9/2011	7:08:54 PM	Helium MFC set to  50.000000
10/9/2011	7:08:56 PM	H2 MFC set to  50.000000
10/9/2011	7:08:57 PM	H2 valve opened
10/9/2011	7:08:57 PM	Helium valve opened
10/9/2011	7:08:59 PM	SiCl4 post valve opened
10/9/2011	7:08:59 PM	SiCl4 pre valve opened
10/9/2011	7:09:06 PM	Bypass valve opened
10/9/2011	7:09:11 PM	Helium MFC set to  500.000000
10/9/2011	7:09:12 PM	H2 MFC set to  500.000000
10/9/2011	7:12:57 PM	Bypass valve closed
10/9/2011	7:12:58 PM	Main Vac valve opened
10/9/2011	8:08:09 PM	Main Vac valve closed
10/9/2011	8:08:11 PM	Helium valve closed
10/9/2011	8:08:12 PM	H2 valve closed
10/9/2011	8:08:12 PM	SiCl4 post valve closed
10/9/2011	8:08:13 PM	SiCl4 pre valve closed
10/9/2011	8:08:41 PM	Helium MFC set to  50.000000
10/9/2011	8:08:42 PM	Helium valve opened
10/9/2011	8:08:44 PM	H2 MFC set to  50.000000
10/9/2011	8:08:46 PM	H2 valve opened
10/9/2011	8:08:51 PM	SiCl4 post valve opened
10/9/2011	8:08:52 PM	SiCl4 pre valve opened
10/9/2011	8:09:00 PM	Bypass valve opened
10/9/2011	8:09:03 PM	Helium MFC set to  500.000000
10/9/2011	8:09:09 PM	H2 MFC set to  500.000000
10/9/2011	8:26:37 PM	Bypass valve closed
10/9/2011	8:26:39 PM	Helium valve closed
10/9/2011	8:26:40 PM	H2 valve closed
10/9/2011	8:26:40 PM	SiCl4 post valve closed
10/9/2011	8:26:41 PM	SiCl4 pre valve closed
10/9/2011	8:26:44 PM	Helium MFC set to  50.000000
10/9/2011	8:26:46 PM	H2 MFC set to  50.000000
10/9/2011	8:27:02 PM	Helium valve opened
10/9/2011	8:27:02 PM	H2 valve opened
10/9/2011	8:27:05 PM	Bypass valve opened
10/9/2011	8:27:07 PM	SiCl4 post valve opened
10/9/2011	8:27:07 PM	SiCl4 pre valve opened
10/9/2011	8:27:10 PM	Helium MFC set to  500.000000
10/9/2011	8:27:12 PM	H2 MFC set to  500.000000
10/9/2011	8:31:21 PM	Bypass valve closed
10/9/2011	8:31:21 PM	Main Vac valve opened
